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Wafer Bonding

Applications and Technology, Springer Series in Materials Science 75

Erschienen am 30.09.2011, Auflage: 1/2004
374,49 €
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Bibliografische Daten
ISBN/EAN: 9783642059155
Sprache: Englisch
Umfang: xv, 504 S., 363 s/w Illustr., 20 farbige Illustr.,
Einband: kartoniertes Buch

Beschreibung

The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

Inhalt

Direct Bonding, Fusion Bonding, Anodic Bonding, Wafer Bonding: A Historical Patent Picture of the Worldwide Moving Front of the State-of-the-Art of Contact Bonding.- Basics of Silicon-on-Insulator (SOI) Technology.- Silicon-on-Insulator by the Smart CutTM Process.- ELTRAN Technology Based on Wafer Bonding and Porous Silicon.- Wafer Bonding for High-Performance Logic Applications.- Application of Bonded Wafers to the Fabrication of Electronic Devices.- Compound Semiconductor Heterostructures by Smart CutTM: SiC-on-Insulator, QUASICTM Substrates, InP and GaAs Heterostructures on Silicon.- Three-Dimensional Photonic Bandgap Crystals by Wafer Bonding Approach.- Wafer Direct Bonding for High-Brightness Light-Emitting Diodes and Vertical-Cavity Surface-Emitting Lasers.- High-Density Hybrid Integration of III--V Compound Optoelectronics with Silicon Integrated Circuits.- Layer Transfer by Bonding and Laser Lift-Off.- Single-Crystal Lithium Niobate Films by Crystal Ion Slicing.- Wafer Bonding of Ferroelectric Materials.- Debonding of Wafer-Bonded Interfaces for Handling and Transfer Applications.